Extended ISO Class 1 Ultra-clean Modulated Pulse AeroBar Model 5635
Simco-Ion’s AeroBar MP Ionizing Bar Model 5635 is specifically designed to eliminate static charge in semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean emitter points and precision adjustment, provides "Extended ISO Class 1" cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.
- Extended ISO Class I cleanliness
- Modulated pulse technology
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Quarter-turn nozzles
- Optional software with easy-to-use interface with wide adjustability
- Alarm output signal