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AeroBar® MP, Modulated Pulse Ionizing Bar for Extended ISO Class 1 Model 5635Extended ISO Class 1 Ultra-clean Modulated Pulse AeroBar Model 5635

Simco-Ion’s AeroBar MP Ionizing Bar Model 5635 is specifically designed to eliminate static charge in semiconductor and other clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultraclean emitter points and precision adjustment, provides "Extended ISO Class 1" cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.

  • Extended ISO Class I cleanliness
  • Modulated pulse technology
  • Excellent lateral uniformity
  • Low field voltages
  • Air-assist capability
  • Quarter-turn nozzles
  • Optional software with easy-to-use interface with wide adjustability
  • Alarm output signal

 

Input Voltage

24 VDC ±10%

Output Voltage

13.5 kV p-p (max), adjustable

Distance

150-1000 mm distance to surface; application & customer specification dependent

Frequency

Default setting at 5 Hz; adjustable from 1-33 Hz

Balance

Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24" distance)

Ion Emission

Modulated pulse (MP) technology

Emitter Points

Single Crystal Silicon emitter points

Emitter Pitch

50 mm or 75 mm spacing between nozzles; 50 mm spacing only on the 450 mm and 600 mm lengths

Air Supply

Clean dry air (CDA) or nitrogen

Airflow

45 psi max gas pressure; 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting (optional)

Ozone

<0.05 ppm

EMI

Below background level

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