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In-tool Ionizing Bars

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Ultra-clean Software-controlled Ionizing AeroBar® Model 5225

Simco-Ion's Ultra-clean Software-controlled Digital Ionizing AeroBar® Model 5225 is specifically designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, charge can be reduced to comply with the E-78 recommended electrostatic levels for technology nodes down to 25 nm, the most stringent requirement of semiconductor manufacturers.

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Ultra-clean Standalone Digital Ionizing AeroBar® Model 5225S

Simco-Ion’s Ultra-clean Standalone Digital Ionizing AeroBar® Model 5225S is specifically designed to provide high performance with simple integration and operation. Adjustable and precise, easy-to-use digital settings allow the AeroBar to be used in a multitude of applications, ranging from inside tools to workstations and cleanroom areas. A choice of ionization modes, output voltage, and timing provide versatility to meet static charge neutralization requirements.

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scorpION3 ISO Class 1 High Performance Digital Ionizing Bar

Simco-Ion’s scorpION3 Ionizing Bar is designed to meet today’s requirements for cleanliness and performance for the semiconductor front-end, semiconductor back-end, and general electronics markets. It’s unique combination of available air assist, “Peak-reduction” technology, numerous emitter point materials and lengths make it suitable for a wide range of applications.


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