SEMI E-78 Compliance Evaluation

In response to the semiconductor industries continuing focus to improving overall equipment efficiency (OEE) and insure consistent yield performance the SEMI organization developed E78 Electrostatic Compatibility-Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment. E78 defines specification levels and test methods used to measure charge and electrostatic fields on wafers and handlers.

This SEMI document describes leading problems caused by uncontrolled electrostatic charge as they affect tool operation and performance in the semiconductor and related clean-manufacturing industries. The E78 document is designed to guide device and equipment manufacturers in determining acceptable electrostatic charge control levels based on manufacturing process and technology considerations.

PROCESS Simco-Ion experts offer a complete evaluation of your control level need based on your product, process, and technology.

Simco-Ion's experience and comprehensive approach ensure engineered assessment and solutions.